电子工业洁净厂房净化空调自控系统设计

安志聪（信息产业电子第十一设计研究院科技工程股份有限公司，成都市 610021）

Design of Cleaning Air‑conditioning Automatic Control System

of Clean Workshop in Electronic Industry

AN Zhicong（The IT Electronics Eleventh Design & Research Institute Scientific and

Technological Engineering Co.,Ltd.,Chengdu 610021，China）

Abstract：Taking the design project of a clean workshop in electronic industry as an example,a detail description is made on the architecture design,reliability design and control circuit of the cleaning air‑conditioning automatic control system in electronic industry as well as the system selection of the control system,and the problems needing attention in the design of automatic control system are discussed.

Key words：electronic industry;clean workshop;cleanliness;clean room;cleaning air‑conditioning system;FFU;automatic control system;PLC;FMCS

摘　要：以某电子工业洁净厂房设计项目为例，详细说明电子工业净化空调自动控制系统架构设计、可靠性设计、控制回路，以及控制系统的选择,探讨自控系统设计中需要注意的问题。

关键词：电子工业；洁净厂房；洁净度；洁净室；净化空调系统；FFU；自动控制系统；PLC；FMCS

中图分类号：TP29     　　  　      文献标识码：A

doi：10.3969 / j. issn.1003 － 8493.2021.09.009